Micro-coil with movable core for application in an inductive displacement sensor

A new concept for a micro-coil is presented. The micro-coil will be used as a sensor that measures the flexion of fingers. For this purpose several mi cro-coils are mounted on a data glove. Though the coil is fabricated by mea ns of silicon bulk micromachining it is possible to move an iron core throu gh the coil without destroying the windings. The inductance of the full coi l is 0.25 mu H without a core and 7.2 mu H with a core. The ohmic resistanc e has a value of 60 Omega.