Bi-directional fast flow sensor with a large dynamic range

In this article an extended mass-Row sensor is presented. Apart from the ma gnitude of the flow, as an add-on to the traditional anemometer, this senso r also measures the direction of the how This is of interest for the flow s ensor market in general, and more in particular for the safety monitoring o f low over-pressure systems like surgeries and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amo unt of gas-flow, down to approximately 100 mu m s(-1) airflow up to high Ro w levels of 1 m s(-1). The response time is of the order of milliseconds.