Designing, simulation and realization of in-plane operating micro valves, using new etching techniques

Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemi cal etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllabil ity and wafer-thickness independence. Integration in micro systems is facil itated by the unique possibility to obtain in-plane working devices. Perfor med analytical and numerical simulations as well as measurements of a duckb ill valve demonstrate the functionality.