Analysis of the N2O dissociation in a RF discharge reactor

In situ diagnostic measurements and reactor modelling are used to study the N2O dissociation by radio frequency (RF) discharges. Measurements are unde rtaken at 0.5 and 1 Torr gas pressure with a RF power density varying from 4.2 to 35.7 mW cm(-2). The reactor modelling involves an electrical dischar ge model coupled to hydrodynamic and mass transfer models. Only an electric al discharge model accounting for the negative inn conversion from O- to NO - and the subsequent electron detachment allow a good coherence between the measured and predicted power densities. The electron-N2O dissociation cros s sections are first fitted in the present work and then the corresponding dissociation rates, obtained from the electrical model, are used in the mas s transfer model which includes eight species (N2O, N-2, O-2 NO, NO2, N, O( P-3) and O(D-1)). The corresponding results are in good agreement with the experimental ones related to the production of N-2 and O-2 and the consumpt ion of N2O. Furthermore, the reactor model results show that N-2 and O-2 at e the most abundant products(>10(14) molecules/cm(3)) at 1 Torr.