The effect of sputtering ions on the structure and properties of diamond-like carbon films

Authors
Zhang, ZJ Narumi, K Naramoto, H Wu, ZP Yamamoto, S Miyashita, A
Citation
Zj. Zhang et al., The effect of sputtering ions on the structure and properties of diamond-like carbon films, J PHYS-COND, 11(25), 1999, pp. L273-L277
Citations number
16
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF PHYSICS-CONDENSED MATTER
ISSN journal
09538984 → ACNP
Volume
11
Issue
25
Year of publication
1999
Pages
L273 - L277
Database
ISI
SICI code
0953-8984(19990628)11:25<L273:TEOSIO>2.0.ZU;2-T
Abstract
Carbon films have been deposited on Al2O3(0001) substrates by sputtering a graphite target with 3 keV CH4+, N+, and Ar+ ions. The structure and proper ties of the films were examined by Auger electron spectrometry, micro-Raman spectroscopy, and optical absorption measurement, and were found to be dep endent on which sputtering ions were used. The stability of the carbon film s was also examined using Fourier-transformed infra-red spectroscopy by ann ealing the films at temperatures from 25 to 200 degrees C.