The local electrical potential at individual grain boundaries and the poten
tial distributions across polycrystalline samples have been measured by usi
ng scanning surface potential imaging with an atomic force microscope. Indi
vidual grain boundaries are isolated for measurement by micropatterning an
array of contacts onto the surface of a ZnO-based varistor material. Quanti
fication of the voltage dependence of the local voltage decrease and resist
ivity is illustrated. Comparisons are made by using optical and electron mi
croscopy and spectroscopy. On a larger scale, potential distributions are m
apped in a polycrystalline ZnO-NiO system that exhibits positive temperatur
e coefficient of resistivity behavior.