Hr. Moutinho et al., Investigation of induced recrystallization and stress in close-spaced sublimated and radio-frequency magnetron sputtered CdTe thin films, J VAC SCI A, 17(4), 1999, pp. 1793-1798
We have induced recrystallization of small grain CdTe thin films deposited
at low temperatures by close-spaced sublimation (CSS), using a standard CdC
l2 annealing treatment. We also studied the changes in the physical propert
ies of CdTe films deposited by radio-frequency magnetron Sputtering after t
he same post-deposition processing. We demonstrated that the effects of CdC
l2 on the physical properties of CdTe films are similar, and independent of
the deposition. method. The recrystallization process is linked directly t
o the grain size and stress in the films. These studies indicated the feasi
bility of using lower-temperature processes in fabricating efficient CSS Cd
Te solar cells. We believe that, after the optimization of the parameters o
f the chemical treatment, these films can attain a quality similar to CSS f
ilms grown using current standard conditions. (C) 1999 American Vacuum Soci
ety.