Investigation of induced recrystallization and stress in close-spaced sublimated and radio-frequency magnetron sputtered CdTe thin films

Citation
Hr. Moutinho et al., Investigation of induced recrystallization and stress in close-spaced sublimated and radio-frequency magnetron sputtered CdTe thin films, J VAC SCI A, 17(4), 1999, pp. 1793-1798
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
17
Issue
4
Year of publication
1999
Part
2
Pages
1793 - 1798
Database
ISI
SICI code
0734-2101(199907/08)17:4<1793:IOIRAS>2.0.ZU;2-E
Abstract
We have induced recrystallization of small grain CdTe thin films deposited at low temperatures by close-spaced sublimation (CSS), using a standard CdC l2 annealing treatment. We also studied the changes in the physical propert ies of CdTe films deposited by radio-frequency magnetron Sputtering after t he same post-deposition processing. We demonstrated that the effects of CdC l2 on the physical properties of CdTe films are similar, and independent of the deposition. method. The recrystallization process is linked directly t o the grain size and stress in the films. These studies indicated the feasi bility of using lower-temperature processes in fabricating efficient CSS Cd Te solar cells. We believe that, after the optimization of the parameters o f the chemical treatment, these films can attain a quality similar to CSS f ilms grown using current standard conditions. (C) 1999 American Vacuum Soci ety.