Cathodic electrosynthesis of RuO2 deposits on Ni, Ti, Pt foils and Si
wafers was accomplished via hydrolysis by an electrogenerated base, Ru
Cl3 . xH(2)O, dissolved in water. By varying the current density and d
eposition time, the amount of the deposited material could be controll
ed. The deposits were characterized by XRD, TG/DTA and SEM. The crysta
llization behavior of the deposits was studied. Crystallite sizes were
determined after annealing at different temperatures from X-ray broad
ening data.