Laser deposition of amorphous diamond-like films from liquid aromatic hydrocarbons

Au experimental investigation was made of the deposition of amorphous diamo nd-like films on transparent substrates by laser irradiation of the interfa ces between such substrates and liquid hydrocarbons [toluene C6H5CH3, benze ne C6H6, cumene C6H5CH(CH3)(2)]. A copper vapour laser (wavelength 510.6 nm , pulse duration 20 ns) was used. The films were studied with x-ray Auger s pectroscopy, high-energy electron diffraction, scanning electron microscopy , and Raman scattering spectroscopy. The sp(3) fraction in the deposited fi lms reached 50%-70%, depending on the choice of hydrocarbon. The average fi lm thickness was 100-200 nm and the microhardness reached 50-70 GPa.