X-ray fluorescence measurements of thin film chalcopyrite solar cells

X-ray fluorescence has turned out to be a very suitable and reliable tool f or the characterization of thin film chalcopyrite solar cells. Besides the composition determination in atomic percent the total mass per unit square (mg/cm(2)) of the analyzed elements and the film thickness can be measured accurately. Furthermore, a real multi-layer analysis allows in addition to determine the CdS, ZnO and Mo thickness simultaneously with the absorber me asurement. By the use of etching techniques, information about a vertical c omposition gradient can also be obtained. This work shows the possibilities and limitations of the X-ray fluorescence technique for the chalcopyrite s olar cell characterization and emphasizes the advantages over the widesprea d electron probe microanalysis. (C) 1999 Elsevier Science B.V. All rights r eserved.