The adatoms, dimers and rest atoms in the three outermost atomic layers of
the Si(111)-(7 x 7) surface are directly imaged with glancing Kikuchi elect
ron holography. The applicability of Kikuchi electron holography to complic
ated multiple-emitter surfaces is evident. The three-dimensional relative p
ositions of atoms on the Si(111)-(7 x 7) surface are in good accordance wit
h the LEED-optimized DAS model.