Blue photoluminescence from thermally grown SiO2 on micromachined arrays of silicon planes

Citation
A. Diligenti et al., Blue photoluminescence from thermally grown SiO2 on micromachined arrays of silicon planes, APPL PHYS L, 75(4), 1999, pp. 489-491
Citations number
21
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS LETTERS
ISSN journal
00036951 → ACNP
Volume
75
Issue
4
Year of publication
1999
Pages
489 - 491
Database
ISI
SICI code
0003-6951(19990726)75:4<489:BPFTGS>2.0.ZU;2-Y
Abstract
SiO2 was thermally grown on arrays of silicon planes obtained from < 110 > substrates by means of micromachining. Blue photoluminescence was observed under pulsed-laser excitation from SiO2 grown on these planes. Experiments revealed that this emission was not affected by the Si/SiO2 interface prope rties or the silicon thickness, whereas its intensity and spectral features depended on the oxide thickness. Moreover, no detectable luminescence was observed from the oxide grown on unpatterned regions, where a smaller amoun t of oxide was excited by the laser beam. The photoluminescence disappeared when the oxide was removed. (C) 1999 American Institute of Physics. [S0003 -6951(99)00625-7].