Lithographic imaging techniques for the formation of nanoscopic features

Authors
Wallraff, GM Hinsberg, WD
Citation
Gm. Wallraff et Wd. Hinsberg, Lithographic imaging techniques for the formation of nanoscopic features, CHEM REV, 99(7), 1999, pp. 1801-1821
Citations number
141
Categorie Soggetti
Chemistry
Journal title
CHEMICAL REVIEWS
ISSN journal
00092665 → ACNP
Volume
99
Issue
7
Year of publication
1999
Pages
1801 - 1821
Database
ISI
SICI code
0009-2665(199907)99:7<1801:LITFTF>2.0.ZU;2-#