Wq. Lu et al., Preparation of TiOx/gamma-Al2O3 catalyst on powdery gamma-Al2O3 by using reactive sputtering deposition, CHIN PHYS L, 16(6), 1999, pp. 426-427
A layer of TiOx, was deposited on powdery gamma-Al2O3 by using flat-target
magnetron sputtering in microwave electron cyclotron resonance plasma. A vi
brator was developed to coat the gamma-Al2O3 particles evenly by TiOx The c
onversion efficiency of methane and both the yield and the selectivity of C
-2 hydrocarbons and C2H2 were revealed to be superior to that by convention
al chemical method. The use of vibrator is effective.