Jw. Schultze et V. Tsakova, Electrochemical microsystem technologies: from fundamental research to technical systems, ELECTR ACT, 44(21-22), 1999, pp. 3605-3627
The interdisciplinary field of electrochemical microsystem technologies (EM
ST) has a large impact on electrochemistry, electrochemical engineering, mi
croengineering, material science, chemical analysis and its applications in
biology and medicine. EMST include electrochemical reactions applied in mi
crosystem technologies (MST) as well as MST applied in electrochemistry.
Fundamental research refers to the scaling-down of reactions taking place i
n the mu m range. Control of electrochemical microreactions, their advantag
es and applications are discussed. The technical requirement of mass produc
tion presumes the scaling-up of the microreaction to a multifold macroscopi
c process. This is demonstrated for electrochemical processes, e.g, the LIG
A process, as well as for MST for electrochemistry, e.g. the Foturan(R) tec
hnology. The final industrial process requires the realization of multistep
processes which is illustrated with the phosphating process and the printe
d circuit board manufacturing us examples. Electrochemical microsystems are
presented and classified by functionality and complexity. (C) 1999 Elsevie
r Science Ltd. All rights reserved.