Secondary ion mass spectrometry, SIMS

Authors
Evans, K
Citation
K. Evans, Secondary ion mass spectrometry, SIMS, FAILURE ANALYSIS OF INTEGRATED CIRCUITS, 1999, pp. 229-240
Categorie Soggetti
Current Book Contents
Journal title
FAILURE ANALYSIS OF INTEGRATED CIRCUITS → ACNP
Year of publication
1999
Pages
229 - 240
Database
ISI
SICI code