Transmission through optically generated inductive grid arrays

Authors
Lockyer, DS Vardaxoglou, JC Kearney, MJ
Citation
Ds. Lockyer et al., Transmission through optically generated inductive grid arrays, IEEE MICR T, 47(7), 1999, pp. 1391-1397
Citations number
13
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES
ISSN journal
00189480 → ACNP
Volume
47
Issue
7
Year of publication
1999
Part
2
Pages
1391 - 1397
Database
ISI
SICI code
0018-9480(199907)47:7<1391:TTOGIG>2.0.ZU;2-4
Abstract
A technique is developed for generating pseudo-metallic plasma inductive gr id arrays within a semiconductor wafer. The induced plasma elements are def ined by a surface impedance which is discussed. Results of an investigation into the transmission properties of a variety of array designs between 16 and 40 GHz are presented. Measurements are performed on a silicon wafer ill uminated by an external optical source via a negative image mask.