An atomically flat SrTiO3(001) surface was successfully obtained by combini
ng ultrasonic agitation-arid subsequent annealing at 1000 degrees C in air
The topographic images taken using an atomic force microscope revealed that
the surface was composed of clear atomic-steps and atomically smooth terra
ces. The steps were 0.2 nm in height corresponding to half of the unit cell
height of SrTiO3, or the single atomic-layer height. The terraces were cat
egorized into two types wide and narrow terraces appear alternately. Surfac
e composition analyzed by coaxial impact collision ion scattering spectrosc
opy indicated that the topmost surface was covered by domains of the SrO an
d TiO2 layers, where the latter domain was dominant. The result suggests th
at the topmost surface of the narrow terrace was terminated by SrO and the
wide terrace by TiO2. This was further examined by the use of:a friction fo
rce microscopy technique with which we were able to distinguish the differe
nt surface terminations.