Phase equilibria in In-metal-As systems: Systematic trends in phase diagram topology and implications for the development of contact materials to InAs

Authors
Citation
D. Swenson, Phase equilibria in In-metal-As systems: Systematic trends in phase diagram topology and implications for the development of contact materials to InAs, J ELEC MAT, 28(7), 1999, pp. 894-901
Citations number
41
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF ELECTRONIC MATERIALS
ISSN journal
03615235 → ACNP
Volume
28
Issue
7
Year of publication
1999
Pages
894 - 901
Database
ISI
SICI code
0361-5235(199907)28:7<894:PEIISS>2.0.ZU;2-R
Abstract
Isothermal phase equilibria are established in the InAs-rich regions of 16 In-M-As ternary systems, where "M" denotes a transition or noble metal. The se new data, combined with work previously reported in the literature, prov ide a nearly complete picture of phase equilibria in In-M-As systems. The t opologies of the In-M-As phase diagrams are found to vary systematically ac cording to the position of M in the periodic table. This correlation may be rationalized using experimental thermodynamic data found in the literature , and reflects a systematic dependency of the relative thermodynamic stabil ities of transition and noble metal indides and arsenides on atomic number of the metal. These phase diagram data are also utilized to select material s that are suitable as contact metallizations to InAs. Based on the criteri a of thermodynamic equilibrium, ease of fabrication, and high melting point , W, Re, Os, RhIn3, PdIn and PtIn2 are identified as the most promising pot ential contact materials to InAs.