Miniaturized, focusing fan-out elements: design, fabrication and characterization

We present miniaturized, focusing fan-out elements. The new micro-optical e lements were fabricated using different technologies: double-sided injectio n moulding in polycarbonate, double-sided photolithography with subsequent transfer in quartz and direct laser writing in photoresist. The fan-out ele ments were characterized by measuring their efficiency and uniformity, the surface profiles of the microlenses were measured with a Twyman-Green inter ferometer. The overall performance of the combined, hybrid elements is demo nstrated with intensity distributions recorded in the focal planes.