In order to clarify the formation mechanism of zilconia fine particles prod
uced by spray-pyrolysis, the fine structure with particles is elucidated ba
sed on structural analysis of dried particles and decomposed particles. Fro
m SEM photograph observation, relatively large hollow spheres appear In par
ticles produced from the concentrated solution with 1 kmol.m(-3) and those
from the dilute solution with 0.1 kmol.m(-3) are solid spheres. From struct
ural analysis of the dried and decomposed particles, it is indicated that t
he dried particles are non-porous with irrespective of the temperature and
the concentration. For the dilute solution, the decomposed particles under
any temperatures have mesopores. For the concentrated solution, however, th
e pore radius shifts from the micropore region to the mesopore region with
increase in temperature.