Hydrogen-atom number in platinum-hydrogen complexes in silicon

Four different platinum-hydrogen complexes are identified in silicon by tra nsient capacitance spectroscopy. From deep-level depth profiling, we are ab le to identify the number of hydrogen atoms in the defect complexes. Three of the platinum-hydrogen complexes are electrically active, and contain one , two, and three hydrogen atoms, respectively. A Complete electrical passiv ation of substitutional Pt is achieved by at least four hydrogen atoms. Our results are in agreement with experimental data on a Pt-H-2 complex and a theoretical study on the structure and level positions of these defect comp lexes. [S0163-1829(99)04328-3].