Studies on the electronic properties, microstructure and growth of amorphous carbon nitride films prepared in electron cyclotron resonance plasma

Authors
Bhattacharyya, S Turban, G
Citation
S. Bhattacharyya et G. Turban, Studies on the electronic properties, microstructure and growth of amorphous carbon nitride films prepared in electron cyclotron resonance plasma, RRD APP PHY, 1, 1998, pp. 219-249
Categorie Soggetti
Current Book Contents
Journal title
RECENT RESEARCH DEVELOPMENTS IN APPLIED PHYSICS, VOL 1 (1998) → ACNP
Volume
1
Year of publication
1998
Pages
219 - 249
Database
ISI
SICI code