An artificial nose based on a micromechanical cantilever array

A novel chemical sensor based on a micromechanical array of silicon cantile vers is presented. Chemical reactions are transduced by sensitization of ca ntilevers with coatings such as metals, self-assembled monolayers, or polym ers into a mechanical response. This is read out using an optical beam-defl ection technique by a sequential readout scheme. Reference cantilever senso rs permit subtraction of background signals (differential measurement). Coa ting of each cantilever sensor with a different sensitive layer allows oper ation of the array-device as a new form of chemical nose. Detection of hydr ogen, primary alcohols, natural flavors, and water vapor is demonstrated. W e show that the magnitude of sensor response is proportional to the amount of analyte present. (C) 1999 Elsevier Science B.V. All rights reserved.