Chromium carbide thin films synthesized by pulsed Nd : YAG laser deposition

Chromium carbide thin films are synthesized on Si(100) substrates by a puls ed Nd:YAG laser deposition method at different substrate temperatures. Glan cing-angle X-ray diffraction shows that a crystalline chromium carbide film can be prepared at the substrate temperature of 700 degrees C. Grain size of the films, examined with a field-emission secondary electron microscope, increases with increasing substrate temperature.