Shea period superlattices of (InSb)(m)(InP)(n) were grown on semi-insu
lating (001) InP substrates by atomic layer molecular beam epitaxy. Hi
gh resolution x-ray diffractometry was used to study the structural qu
ality of the superlattices. Raman spectroscopy, in conjunction with th
eoretical calculations, provided information about intermixing at the
interfaces. (C) 1997 American Institute of Physics.