High resolution electron backscatter diffraction with a field emission gunscanning electron microscope

Authors
Humphreys, FJ Brough, I
Citation
Fj. Humphreys et I. Brough, High resolution electron backscatter diffraction with a field emission gunscanning electron microscope, J MICROSC O, 195, 1999, pp. 6-9
Citations number
7
Categorie Soggetti
Multidisciplinary
Journal title
JOURNAL OF MICROSCOPY-OXFORD
ISSN journal
00222720 → ACNP
Volume
195
Year of publication
1999
Part
1
Pages
6 - 9
Database
ISI
SICI code
0022-2720(199907)195:<6:HREBDW>2.0.ZU;2-Y
Abstract
A scanning electron microscope with a thermal field emission gun (FEGSEM) i s found to offer significant improvements in electron backscatter diffracti on performance over a conventional W-filament scanning microscope. The spat ial resolution is improved by a factor of approximate to 3 in the FEGSEM an d is optimized at probe currents of 50-300 nA and at 10-15 keV. The angular accuracy is optimized at probe currents above approximate to 150 nA and at 30 keV.