Multiple boron-doped Ge quantum dots are investigated. The structure, which
consists of 20 periods of Ge quantum dots stacked with 6 nm Si spacers, is
grown on a Si(100) substrate by; solid source molecular beam epitaxy. Cros
s-sectional transmission electron;microscopy: and atomic force microscopy a
re used to characterize the structural properties of these ae dots. Raman s
pectrum shows a downward shift of the Ge-Ge mode, which is attributed to th
e phonon confinement in the Ge dots. From polarization dependent Raman spec
tra, the strong inter-sub-level transition in the Ge quantum dots is observ
ed. The transition is further confirmed by Fourier transform infrared spect
roscopy using a waveguide geometry. The observed peak at 5 mu m in the infr
ared absorption spectrum is consistent with that in the Raman spectrum and
attributed to the transition:between the first two heavy hole band states o
f the Ge quantum dots. The polarization dependence measurement is used to s
tudy the nature of the transitions. This study suggests the possible use of
Ge quantum dots for infrared detector application. (C) 1999 American Vacuu
m Society. [S0734-2101(99)04304-3].