Deposition of PZT thin films by excimer laser ablation for piezoelectric application

Deposition of PZT (Pb(Zr-0.52,Ti-0.48)O-3) With KrF excimer laser ablation was applied for realization of thin film piezoelectric actuators. Deposited layer of more than I micron is necessary for piezoelectric application. Ho wever such rather thick film deposition is difficult to form because of pea l off or crack formation of the deposited layer. XRD analyses and SEM observation were performed to evaluate the deposited P ZT layers. Pyroclore phase obtained at high temperature deposition cannot b e transformed into Perovskite phase by the annealing. On the other hand, Pe rovskite phase is grown from the amorphous phase obtained at room temperatu re deposition. EDX analysis shows the Pb deficiency in the residual Pyroclo re phase. Perovskite phase transformation can be enhanced by adding excess PbO to the PZT film. A multi-layered structure was effective for the transf ormation with less necessity of diffusion.