J. Baborowski et al., Fabrication and characterization of micromachined accelerometers based on PZT thin films, FERROELECTR, 224(1-4), 1999, pp. 711-718
In this paper the simple accelerometers based on PZT thin films were develo
ped and characterized. The functions of seismic mass and spring are given b
y a boss loaded cantilever structure. The strain of the cantilever is detec
ted by a Pb(Zr,Ti)O-3 thin film. A 2 mm long and 0.8 mm wide cantilever yie
lded a response of 0.6 mV/g In the frequency interval between I and 600 Hz.
With Delta f = 600Hz a limit of about 1mg* at 1Hz, and less above this fre
quency, was observed. The response predicted by the analytical model is clo
se to the actual response of the device. A working miniaturized acceleromet
er prototype could be thus demonstrated.