Fabrication and characterization of micromachined accelerometers based on PZT thin films

In this paper the simple accelerometers based on PZT thin films were develo ped and characterized. The functions of seismic mass and spring are given b y a boss loaded cantilever structure. The strain of the cantilever is detec ted by a Pb(Zr,Ti)O-3 thin film. A 2 mm long and 0.8 mm wide cantilever yie lded a response of 0.6 mV/g In the frequency interval between I and 600 Hz. With Delta f = 600Hz a limit of about 1mg* at 1Hz, and less above this fre quency, was observed. The response predicted by the analytical model is clo se to the actual response of the device. A working miniaturized acceleromet er prototype could be thus demonstrated.