Remanent piezoelectric constant of PZT thin films

The investigation of piezoelectric properties of materials in the thin laye r form has become an important task because of the increased range of their applications as actuators and sensors. Pb(Zr,Ti)O-3 thin films and the mod ified compositions have attracted great attention in recent years as promis ing for use in micro-electro-mechanical systems. The actuator magnitude, is an indirect function of the e(31) piezoelectric constant. To determine thi s constant we use an unusual experimental method. A remanent piezoelectric constant of -4.7 C/m(2) was obtained. To show the possible integration of t he piezoelectric films in flat silicon ultrasonic micromotors, we have depo sited a 3.5 mu m thick PZT on square membranes by rf magnetron sputtering. Self polarisation, remanent piezoelectric constant and dielectric permittiv ity are presented as function of the PZT thickness.