In this letter, me report the full development of 1.2 kV Trench IGBT's with
ultralow on-resistance, latch-up free operation and highly superior overal
l performance when compared to state of the art IGBT's, The minimum forward
voltage drop at the standard current density of 100 A/cm(2) was 1.1 V for
nonirradiated devices and 2.1 V for irradiated devices. The maximum control
lable current density was in excess of 1000 A/cm(2).