Effects of etching time and thickness on the performance of the microstripline resonator of YBa2Cu3Ox thin films

Microstrip transmission lines in the form of an open-ended half-wavelength resonator were fabricated by depositing YBa2Cu3Ox, thin films on MgO substr ates using the pulsed laser deposition method. All YBa2Cu3Ox thin films had c-axis orientation. The effects of etching time and thickness on the perfo rmance of the microstrip line resonator were investigated. As the etching t ime increased, the loaded quality factor decreased and the surface resistan ce increased due to the undercut and the increase in roughness of the etche d surface. The quality factor and the surface resistance showed a strong de pendence on the film thickness. The superconducting properties and the micr owave characteristics correlated well with the microstructure.