Optical properties of polymer-like organic thin films deposited by plasma-enhanced chemical vapor deposition using toluene as the precursor

Authors
Joo, JR Quan, YC Jung, DG Kim, SJ Kim, SY
Citation
Jr. Joo et al., Optical properties of polymer-like organic thin films deposited by plasma-enhanced chemical vapor deposition using toluene as the precursor, JPN J A P 1, 38(4A), 1999, pp. 2150-2151
Citations number
7
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS → ACNP
Volume
38
Issue
4A
Year of publication
1999
Pages
2150 - 2151
Database
ISI
SICI code
Abstract
Polymer-like organic thin films (POTFs) were deposited by plasma-enhanced c hemical vapor deposition (PECVD) using toluene as the precursor. Refractive indices and extinction coefficients of the POTFs could be varied by changi ng the plasma power and the deposition temperature, which are easily and co ntinuously controllable deposition parameters.