Evaluation of (Pb, La)(Zr, Ti)O-3 (PLZT) capacitors of different film thicknesses with Pt/SrRuO3 top electrodes

(Pb, La)(Zr, Ti)O-3 [PLZT] films with thicknesses of 150, 225 and 300 nm we re prepared by chemical solution deposition (CSD) on Pt/IrO2 coated SiO2/Si wafers. Top electrodes of Pt/SRO were sputter deposited and annealed at 60 0 degrees C to form a capacitor. All three PLZT films were highly (111) ori ented and showed high switchable polarization of >40 mu C.cm(-2) at 200 kV. cm(-1). A coercive field of 40 kV.cm(-1) was observed for all three films r egardless of thickness. Little fatigue degradation was observed up to 10(10 ) cycles. These results indicate that it is possible to combine both oxide and metallic contacts in a high endurance ferroelectric capacitor for low v oltage applications.