Surface acoustic wave properties of diamond-like carbon thin films

Diamond-like carbon thin films were deposited by rf magnetron sputtering wi th substrate biasing, and the film deposited on Si(100) showed good diamond -like properties whereas the films suffered from delamination and buckling if their thicknesses were more than 1 mu m. The surface acoustic wave chara cteristics in the ZnO/IDT/DLC/Si(100) structure were examined by using a tr ansversal-type SAW filter. The Ist mode SAW (Sezawa wave) velocity at kH(DL C) = 0.262 and kH(ZnO) = 0.837 in the ZnO/IDT/DLC/Si(100) multilayer struct ure was 5,614 m/sec. The SAW velocity in this structure was higher than the one theoretically calculated for the ZnO/Si structure.