Hierarchical mixed-domain circuit simulation, synthesis and extraction methodology for MEMS

Emerging results for mixed-domain circuit simulation, a component-level syn thesis strategy, and a layout extractor is presented for use in design of m icroelectromechanical systems (MEMS). The mixed-domain circuit representati on is based on Kirchhoffian network theory. Micromechanical and electromech anical components may be partitioned hierarchically into low-level reusable elements. The MEMS component-level synthesis approach uses optimization to generate microstructure layout that meets specified performance criteria. A feature-recognition based extractor for verification translates layout ge ometry into the mixed-domain circuit representation. A common MEMS componen t, the integrated microresonator, demonstrates the use of these tools. Lump ed-parameter MEMS simulation of the resonant frequency matches finite-eleme nt analysis to 1% and fabricated resonators match to within 4% of the synth esized performance. Based on this initial work, a hierarchical structured d esign methodology for integrated microsystems that is compatible with stand ard VLSI design is proposed.