Electron nanodiffraction

Electron nanodiffraction, particularly as performed in a dedicated STEM ins trument with coherent illumination, provides, in principle, a means for obt aining information on structural detail in the range between that of STEM i mage resolution, about 0.2 nm, and the limits of information possible from elastic scattering from atoms, about 0.03 nm. In practice, most nanodiffrac tion work has been concerned with finding the crystal structure, crystal de fects, and sometimes crystal shapes for nanoparticles in the size range of 1-2 nm or for regions of thin crystalline films of about these dimensions. Available equipment allows for the recording of nanodiffraction patterns at the rate of 30 per second, or faster, providing means for detailed study o f extended areas or of dynamical processes. Microsc. Res. Tech. 46:75-97, 1 999. (C) 1999 Wiley-Liss, Inc.