Role of the film texturing on the response of particle detectors based on CVD diamond

Citation
G. Faggio et al., Role of the film texturing on the response of particle detectors based on CVD diamond, MICROSYST T, 5(4), 1999, pp. 151-156
Citations number
13
Categorie Soggetti
Instrumentation & Measurement
Journal title
MICROSYSTEM TECHNOLOGIES
ISSN journal
09467076 → ACNP
Volume
5
Issue
4
Year of publication
1999
Pages
151 - 156
Database
ISI
SICI code
0946-7076(199907)5:4<151:ROTFTO>2.0.ZU;2-N
Abstract
Recent improvements in the quality of diamond films grown by Chemical Vapou r Deposition (CVD) have made synthetic diamond a very attractive material f or detection applications. In this paper, polycrystalline diamond films syn thesised by microwave plasma enhanced CVD using a CH4-CO2 gas mixture, prev iously investigated as particle detectors, have been characterised by X-ray diffraction and Raman spectroscopy. The detector response was measured in vacuo under irradiation with 5.5 MeV alpha-particle from a Am-241 source. A systematic study of the influence of the film structural properties on the detector performance has been carried out by changing the methane concentr ation in the growth plasma and the deposition temperature. The existence of a correlation between growth conditions, film texturing and detector perfo rmance has been demonstrated. Independently of the substrate temperature, ( 1 0 0) orientated films exhibit the lowest detection efficiencies. The meas ured collection distances are smaller than the average grain sizes and see m to be limited by trapping centres within the grains. These results are co nfirmed by Raman analysis.