Electrostatic comb-drive actuators made of polyimide for actuating micromotion convert mechanisms

For conventional micromachines, in particular, micromotion convert mechanis ms, the output points of the mechanism can move horizontally when input poi nts move in the same direction. Therefore, we have proposed a three-dimensi onal motion convert mechanism whose output points can move vertically when the input points move in the horizontal direction. This 2-degree-of- freedo m (DOF) mechanism consists of electrostatic comb-drive actuators and a basi c mechanism with large-deflective elastic hinges. In this study. the charac teristics of comb-drive actuators are analyzed. The electrostatic comb-driv e actuator which is made up of polyimide is fabricated by CVD, RIE, Wet etc hing, etc., technologies, The relationship between the input (voltage) and the output (displacement) of the drive has been analyzed both theoretically and experimentally.