Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review

Authors
Rymuza, Z
Citation
Z. Rymuza, Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review, MICROSYST T, 5(4), 1999, pp. 173-180
Citations number
62
Categorie Soggetti
Instrumentation & Measurement
Journal title
MICROSYSTEM TECHNOLOGIES
ISSN journal
09467076 → ACNP
Volume
5
Issue
4
Year of publication
1999
Pages
173 - 180
Database
ISI
SICI code
0946-7076(199907)5:4<173:CTAMPO>2.0.ZU;2-H
Abstract
The problem of modification of rubbing surfaces in micrometer size microdev ices (micro-electro-mechanical systems - MEMS) to control adhesion, frictio n and wear as well as mechanical properties is discussed. Several solutions are reviewed and examples of investigation results are given.