Unconventional MBE strategies from computer simulations for optimized growth conditions

We investigate the influence of step-edge diffusion (SED) and desorption on molecular-beam epitaxy (MBE) using kinetic Monte Carlo simulations of the solid-on-solid model. Based on these investigations we propose two strategi es to optimize MBE growth. The strategies are applicable in different growt h regimes: During layer-by-layer growth one can exploit the presence of des orption in order to achieve smooth surfaces. By additional short high flux pulses of particles one can increase the growth rate and assist layer-by-la yer growth. If, however, mounds are formed (non-layer-by-layer growth), the SED can be used to control size and shape of the three-dimensional structu res. By controlled reduction of the flux with time we achieve a fast coarse ning together with smooth step edges. [S0163-1829(99)04727-X].