Effect of temperature errors on accuracy of deep traps parameters obtainedfrom transient measurements

The procedure of determination of deep traps parameters by both deep level transient capacitance spectroscopy (DLTS) and photoinduced transient spectr oscopy (PITS) is based on Arrhenius plot illustrating the dependence of the rmal emission rates as a function of temperature. In this article the effec t of temperature measurement inaccuracy on the values of activation energy and capture cross-section obtained from the Arrhenius plot is analyzed. The inaccurate values of temperature involve both a change of slope and shift of the Arrhenius plots along vertical axis. The practical application of th e analysis is exemplified by estimation of the temperature errors responsib le for the shift of Arrhenius plots related to the center A in irradiated s ilicon. This article addresses the issue of temperature errors in DLTS and PITS measurements from the metrological point of view. (C) 1999 American In stitute of Physics. [S0034-6748(99)01707-4].