The growth quality and structure parameters of(AlP)(n)/(GaP)(n) short-perio
d superlattices (n = 4, 6) grown by MOVPE using TMGa, TMA1 and PH3 were mea
sured by x-ray double crystal diffraction. Based on this. Raman spectra of
the samples were measured and analysed and they were studied by comparing w
ith the Raman spectra of a GaP single crystal. For the samples, the double-
phonon modes of the first-order Raman scattering all exist. Moreover. the s
econd-order Raman scattering peaks are observed to exist.