Cw. Ong et al., Physical properties of room temperature deposited B-C-N-O films prepared by dual-ion-beam deposition, SURF COAT, 115(2-3), 1999, pp. 145-152
B-C-N-O films with various compositions were prepared at room temperature u
sing dual-ion-beam deposition. The films are divided into three groups, wit
h C contents below 10 at.%, between 10 and 35 at.%, and above 35 at.%, resp
ectively. The films of the first group are dominated by the existence of a
B-O phase. They have wider optical band gaps E-g, and are therefore more tr
ansparent and insulating. The volume fraction of the B-O phase decreases wi
th increasing C content, thereby leading to a drop in the hardness H. The s
econd group of films contains a h-BN phase, and so have smaller E-g and hig
her room temperature electrical conductivity sigma(room). H rises and appro
aches that of h-BN when the C content reaches 35 at.%. The third group of f
ilms contains a large fraction of a graphite phase, which greatly affects t
he films properties, leading to a further reduction of E-g and a rise in si
gma(room). H becomes lower with increasing C content. This work demonstrate
s that the optical, electrical and mechanical properties of B-C-N-O films c
an be tailored by adjusting the composition. (C) 1999 Elsevier Science S.A.
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