Interdiffused quantum-well infrared photodetectors for color sensitive arrays

Proton implantation and rapid thermal annealing were used to tune the infra red spectral response of quantum-well infrared photodetectors (QWIP) by up to 1.4 mu m. Multiple proton implants at energies between 200 and 420 keV w ere used to create homogeneous quantum-well intermixing throughout the devi ce's multiple-quantum-well structure. Photoluminescence and spectral respon se measurements were used to study the effect of proton implantation on QWI Ps for a series of doses up to 3.5x10(15) protons cm(-2). By using a mask d uring implantation, a method of constructing a color sensitive array is pro posed. (C) 1999 American Institute of Physics. [S0003-6951(99)02333-5].