A possibility for decorating atomic steps on single-crystal surfaces by usi
ng ultralow energy ion beams is reported. Isotopically pure ion beams are p
roduced by a mass separator and subsequently decelerated by an electrostati
c lens. The lens was designed to allow sweeping of the ion beam in order to
obtain a uniform deposition over a large area. The preferred sites of sing
le Co atoms on Ag are investigated with in situ scanning tunneling microsco
py measurements. A clear indication is found that by increasing the energy
of the deposited Co to several electron volts, an enhanced Co decoration of
the Ag steps is induced. This technology opens perspectives for an increas
ing number of elements which can form self-organized nanostructures such as
atomic wires on vicinal crystal surfaces. (C) 1999 American Institute of P
hysics. [S0003-6951(99)03533-0].