M. Yata et H. Rouch, Control of the initial oxidation on Cu(001) surface by selection of translational energy of O-2 molecules, APPL PHYS L, 75(7), 1999, pp. 1021-1023
In the initial oxidation of Cu(001) by O-2, the surface is oxidized in a la
yer-by-layer manner up to one monolayer, followed by Cu2O islanding. The la
yer-by-layer oxidation is promoted by the increasing translational energy o
f incident O-2 and is insensitive to surface temperature. By contrast, the
formation of Cu2O is promoted by the decreasing translational energy of inc
ident O-2 and by increasing surface temperature in the temperature range be
tween room temperature and 650 K. Our results demonstrate controllable init
ial oxidation by the adjustment of the translational energy of O-2, offerin
g the prospect of using this approach to aid in the development of new fabr
ication of metal oxide and Si devices. (C) 1999 American Institute of Physi
cs. [S0003-6951(99)03333-1].