Influence of processing parameters on electron field emission characteristics of diamond-like carbon films synthesized by pulsed laser deposition

Diamond-like carbon (DLC) films synthesized by the pulsed laser deposition process produce a large electron field emission capacity at low applied fie ld, showing great potential for applications as electron emitters. The subs trate temperature used for preparing the diamond-like carbon (DLC) films by the pulsed laser deposition process pronouncedly modifies the sp(3)-bonds content and the morphology of the DLC films. A large portion of sp(3)-bonds results in a high emission current density (J(e)), whereas spherical clust er geometry results in low turn-on field (E-0). By contrast, gold precoatin gs reduce the resistance for the electron to transport from the substrate t o the DLC clusters without modifying the nature of the DLC clusters. The in corporation of boron into the DLC clusters further improves their electron field emission properties due to appearance of the impurity levels. Moreove r, the post-annealing and the plasma (Ar, NP Or O-2) post-treatment process es alter the morphology and the proportion of sp(3)-bonds for the DLC films , resulting in a marked improvement in their electron field emission behavi or.