Yj. Feng et al., Bi2Sr2CaCu2O8+delta intrinsic Josephson junctions fabricated by a simple technique without photolithography, IEEE APPL S, 9(2), 1999, pp. 4527-4529
Due to the roughness in the surface of the crystal sample, it is hard to us
e photolithography in the patterning process of the Bi2Sr2CaCu2O8+delta int
rinsic Josephson junction. In this gaper, we report a simple technique for
fabricating the Bi2Sr2CaCu2O8+delta intrinsic Josephson junctions. In the p
atterning process, metal masks are used instead of photolithography and arg
on ion milling is applied to form a small mesa on the Bi2Sr2CaCu2O8+delta c
rystal surface. Real four-probe transport measurements are made on the Bi2S
TZCaCU208+6 intrinsic junctions and typical current-voltage characteristics
with multi-branch structure have been observed, from which the superconduc
ting gap parameter can be extracted, Additionally, from the strong hysteres
is in the I-V characteristics, the capacitance C-J of the unit intrinsic Jo
sephson junction can be estimated, which is in good agreement with that eva
luated from the geometric parameters of the unit junction between the two c
opper oxide layers.